A Method of Fabricating High-performance Poly (Vinylidenedifluoride-trifluoroethylene),P(VDF-TRFE) Films
Non-Confidential description of the invention
The invention relates to a method for fabricating organic thin film ferroelectric materials having improved fatigue and thermal stability for use in nonvolatile memory applications. The applications can also extend to piezoelectric and pyroelectric devices such as sensors and detectors. The invention relates to a process of fabricating P(VDF-TrFE) films by modifying the solvent composition. Two solvents MEK and DMSO were mixed in predetermined ratios and that co-solvent mixture was used for fabricating the P(VDF10 TrFE) films. By virtue of such method driven P(VDF-TrFE) films, the ferroelectric capacitors comprising of the same were found to achieve low voltage operation, thermal stability and fatigue endurance, which indicated improved ferroelectric performance of the devices. In addition, the films made by same process also yielded high piezo- and pyro- electric coefficient, indicating improved piezo- and pyro-electric performances of the devices.
Prof.Deepak Gupta(MSE&SCDT), Prof.Ashish Garg(MSE&SCDT) & Ms.Deepa Singh(PhD Student)
Date of Filing